STS MEMS/Smartセンシングデバイスセッション

The MEMS and Sensors industry is at a pivotal juncture, marked by both resilience and turbulence. Although the sector faced difficulties in 2023 and 2024, key megatrends such as autonomous driving, AI, and Industry 4.0 are continue to increase demand. We project that the MEMS industry will reach $20 billion by 2029 and our analysis indicates that Piezo-MEMS technology is becoming increasingly attractive. This technology not only enhances performance but also introduces new features that enable the development, among others, of MEMS microspeakers, micromachined ultrasound transducers, and MEMS micromirrors for laser beam scanning (LBS). Piezo-MEMS technology involves the thin-film deposition of a piezoelectric layer using sputtering or Sol-Gel techniques, with the choice of piezoelectric materials (such as PZT or AlN) influenced by the intended application of the MEMS device. To address the technical challenges associated with PiezoMEMS technology, a robust ecosystem of players has emerged, offering specialized equipment and foundry services. This presentation will explore upcoming opportunities and the dynamics within the PiezoMEMS ecosystem.

Overview introdution of AAC SSE BU. Detailed introducttion of AAC MEMS Speaker Technology, including of the product, benefits, advantages and user cases.

Scandium Aluminium Nitride (ScAlN) is a promising piezoelectric material with outstanding features such as CMOS BEOL compatible, low loss at high frequency, as well as customizable coupling coefficient with varying scandium concentrations. This presentation addresses the challenges inherent in ScAlN thin film technology development, showcasing the adaptability of ScAlN MEMS platforms for cutting-edge applications. Join us to explore how our technology and collaborative models can accelerate the commercialization of your piezoMEMS innovations.