STS MEMS/Smart Sensing Session
Advanced Materials: The Potential of Piezoelectric MEMS (Acoustic Devices)
Conference Tower 607 / Online (Zoom)
Fee (Exclusive of tax)
- Per Session : SEMI Members 10,000JPY / Non-Members 20,000JPY
- STS 1 Day Pass : SEMI Members 27,000JPY / Non-Members 54,000JPY
*Above fee includes "Download Presentation Materials" (some presentation materials might be written in Japanese)
*Please note that there are separate tickets for in-person and online participation.
The development and practical application of piezoelectric MEMS is accelerating as a result of the increasing performance of the deposition equipment used for piezoelectric materials, and there are high expectations for their application in mobile devices and medical equipment. In this session, we will report on piezoelectric MEMS (acoustic devices), covering general theory, market trends and the current state of device development.
< SEMI Technology Symposium (STS) >
This first technology seminar series in SEMICON Japan founded in 1982, now grown to the international tech symposium marks the 43rd this year. It has been developed as a place to discuss technology among engineers by picking-up the semiconductor technology trends and its issue and sharing the practical technologies to the industry. This symposium stimulates global business growth by involving a variety of different players and visitors.
This program is organized thanks to "SEMI Technology Steering Committee (STS)" formed by top engineers from industry-leading companies, universities, and research institutions.
Program Agenda
*Please note that the program may be subject to change.
Session Chairs: *In alphabetical order by company name
Masahiko Takei (Fuji Electric), Toshiyuki Takahashi (OMRON), Kentaro Totsu (Tohoku University)
In recent years, piezoelectric devices have been gaining attention. New piezoelectric MEMS are emerging beyond just inkjet printer heads and gyroscopes, suggesting a broader range of future applications. Additionally, new technologies for another important piezoelectric device, acoustic wave filters, are being developed toward future needs. This presentation will explain these trends of "Piezo Device 2.0," clarifying the latest technologies in piezoelectric devices and their future direction.
The MEMS and Sensors industry is at a pivotal juncture, marked by both resilience and turbulence. Although the sector faced difficulties in 2023 and 2024, key megatrends such as autonomous driving, AI, and Industry 4.0 are continue to increase demand. We project that the MEMS industry will reach $20 billion by 2029 and our analysis indicates that Piezo-MEMS technology is becoming increasingly attractive. This technology not only enhances performance but also introduces new features that enable the development, among others, of MEMS microspeakers, micromachined ultrasound transducers, and MEMS micromirrors for laser beam scanning (LBS). Piezo-MEMS technology involves the thin-film deposition of a piezoelectric layer using sputtering or Sol-Gel techniques, with the choice of piezoelectric materials (such as PZT or AlN) influenced by the intended application of the MEMS device. To address the technical challenges associated with PiezoMEMS technology, a robust ecosystem of players has emerged, offering specialized equipment and foundry services. This presentation will explore upcoming opportunities and the dynamics within the PiezoMEMS ecosystem.
Overview introdution of AAC SSE BU. Detailed introducttion of AAC MEMS Speaker Technology, including of the product, benefits, advantages and user cases.
Scandium Aluminium Nitride (ScAlN) is a promising piezoelectric material with outstanding features such as CMOS BEOL compatible, low loss at high frequency, as well as customizable coupling coefficient with varying scandium concentrations. This presentation addresses the challenges inherent in ScAlN thin film technology development, showcasing the adaptability of ScAlN MEMS platforms for cutting-edge applications. Join us to explore how our technology and collaborative models can accelerate the commercialization of your piezoMEMS innovations.