TSI Incorporated

Innovative 10 nm Particle Measurement in UPW: TSI Nano LPM System

Friday, December 13 | 10:30 am - 10:50 am

Hall5 (East Hall5 Theater)

Free

Innovative new instrument provides effective detection of 10 nm particles in Semi UPW. By removing solid particles from UPW, the Nano LPM System reliably detects all solid materials in UPW, enabling data driven decisions and predictive maintenance activities to address issues in real time.