HORIBA,Ltd
Solutions for yield improvement of the lithography process
Wednesday, December 11 | 1:30 pm - 2:20 pm
Hall4 (East Hall4 Show Office)
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We will introduce HORIBA's activities, focusing on the latest new applications of PD - Reticle/Mask Particle Detection System, based on the examples in the reticle inspection process for advanced packaging, which is attracting attention in the recent semiconduction industry.