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SEMI Business Solution

Explore in-depth information of products and technologies beyond the booth at exhibitor presentations available in the Exhibitor Seminar Rooms. Participation in all the seminars is free.

Deadline for registration : Thu., Dec., 10  ※ An Advance registration is required.

Note 

(1) Company e-mail address is required for registration. Free-mail address is not accepted. 

(2) We may decline registration from competitors and individuals. 

(3) Those who can participate will be notified separately after Dec., 10.

Sessions

Sumitomo Heavy Industries : Seminar on "Air servo" technology, which can break through the common sense of accuracy and efficiency!

Friday, December 11 | 10:30 am - 11:00 am
Manufacturers handling memory, which are becoming smaller, larger in capacity, and faster in speed, are looking for actuators that can perform high-speed, high-precision work.  We can freely set the stop position and pressure with the operability of a servo motor by the air drive that we have independently worked on and the control algorithm that controls it accurately, and it is lighter and more compact than linear, and from ball screw & high precision cylinder.  By developing a clean, low-maintenance actuator, we thought that we could realize a product that meets the expectations of our customers.  Taking advantage of the feature of being able to perform delicate work at high speed, it is necessary to take advantage of the tension control of film transport, work that requires reliability such as switching durability test, inheritance of craftsmanship such as lens polishing and scraping, and fine setting and movement.  We can handle a wide range of tasks such as processing thin, brittle, and fragile materials, and we will propose innovative technologies that upgrade our customers' production styles.  We are waiting for those who think that this is impossible, those who have difficult consultations across industries, and those who have unique problems.

Kanken Techno : Proposal of innovative abatement equipment from "Kanken Techno" that we create the future environment

Friday, December 11 | 11:00 am - 11:30 am

Caddi : Procurement Cost Management for Semiconductor Equipment Manufacturers

Friday, December 11 | 11:30 am - 12:00 pm
Purchasing components of the equipment has several issues, especially cost related. This seminar shows how to innovate the procurement of semiconductor equipment manufacturers.

ERS electronic : 50 Years of Thermal Innovation

Monday, December 14 | 10:30 am - 11:00 am
The CEOs of ERS electronic, Klemens Reitinger and Laurent Giai-Miniet will reveal some of the secrets behind their award-winning products, including Ultra-Low Noise capability in the low femto-Ampere range, High Voltage/High Current up to 10kV/600A, Anti-Magnetic for minimal magnetic influence, and High Thermal Uniformity down to ±0.1°C

INFICON : Novel Solution for Semi Manufacturing Operation and Process Optimization

Monday, December 14 | 11:00 am - 11:30 am
【SENSING】 The new sensor to catch process anomaly specifically on real time leakage detection, 『AUGENT』 is introduced 【CONNECT & PREDICT】 The fab scheduling and optimization system 『FPS』 provides the newest application of the modern functionality for Automotive Zero defect production and recent significant production change.

Nihon Pall : MITIGATION OF MICROBRIDGING DEFECTS IN EUV LITHOGRAPHY THROUGH ADVANCED FILTRATION TECHNOLOGIES

Monday, December 14 | 11:30 am - 12:00 pm
Installation of EUV tool is exponentially increasing for performance improvement of semiconductor device. The first insertion of EUV lithography into manufacturing utilizes chemically amplified resist (CAR). In ArF and ArF immersion lithography, which also utilize CAR, both bulk and point-of-use (POU) filtration played significant role for microbridge defect reduction by removing mostly gels, which is likely derived from aggregated polymer molecules. Concern for the microbridge defects getting higher for EUV lithography filtration. It has been reported that microbridging is the key limiting factor for resolution. The goal of this study is to find how POU resist filtration can minimize microbridge floor in EUV lithography with half pitch 16 nm as well as performing better start up defectivity, which is also important for efficiency of EUV cluster.

HORIBA : Welcome to HORIBA Smart Sensing Technology Park

Tuesday, December 15 | 10:30 am - 11:00 am
In order to improve the throughput and the yield of the production of leading edge devices, HORIBA, a leader in flow control and optical spectroscopy measurement, offers a wide range of sensors and material characterization equipment to optimize the different manufacturing processes. Our solution for flow control, chemical concentration monitors, endpoint detection, chamber health monitoring, mask inspection and advanced material characterization and facility exhaust monitoring will be introduced. Please join our webinar to find how HORIBA can help you to solve the issues you are facing.

SCREEN Semiconductor Solutions : SCREEN’s New Solutions for Wafer Cleaning

Tuesday, December 15 | 11:00 am - 11:30 am
SCREEN will introduce a new solutions to help solve the wafer-cleaning issues associated with the miniaturization and integration of advanced semiconductor devices.

Tokico System Solutions : Products for Semiconductor industry,including Ultrasonic Voetex Flowmeter

Tuesday, December 15 | 11:30 am - 12:00 pm
Tokico System Solutions is specializing in manufacturing measuring equipment and in systems, we provide users with various measuring instruments and system solutions under the slogan of "flow,measure  and supply." We introduce products useful for semiconductor manufacturing processes and factory facilities, such as the ultrasonic vortex flowmeter.In addition, we  propose "agility collaboration" to solve customers' problems.

Semilab Japan:1. Introduction of inspection and measurement technology for ion implantation / annealing process control 2. Evaluation of electrical properties of GaN, SiC, and AlGaN / GaN by non-contact measurement technology

Wednesday, December 16 | 10:30 am - 11:00 am
1. Introduction of inspection and measurement technology for ion implantation / annealing process control 2. Evaluation of electrical properties of GaN, SiC, and AlGaN / GaN by non-contact measurement technology

Rigaku : X-RAY METROLOGY IN YOUR TOOLBOX

Wednesday, December 16 | 11:00 am - 11:30 am
We will introduce our X-ray metrology solution for technological chalenges of  advanced process, power device, MEMS/IoT/Sensor/RF device. Finaly, we will present developing roadmap of X-ray metrology.

Hitachi High-Tech : Non-destructive wafer quality control using Mirror Electron Inspection System “Mirelis VM1000”

Wednesday, December 16 | 11:30 am - 12:00 pm
This technology allows detection of crystal defects without the electron beam hitting the sample. We will introduce the principles and features of this new technology, which is significantly different from the existing SEM(*), and also introduce non-destructive inspection examples of SiC, GaN, and Ga203 device wafers that were taken using the Mirelis VM1000.   *SEM: Scanning Electron Microscope

Advantest : Testing in the Age of Exascale Computing

Thursday, December 17 | 10:30 am - 11:00 am
After 55 years of Moore‘s Law driven semiconductor evolution we are not experiencing a slow down of innovation but rather an acceleration due to the broad need for more computation performance. This need is driven by AI/ML applications such as autonomous cars, face recognition and big data analysis. Computer architectures are changing towards massive parallel structures with heterogeneous integration. While the complexity increases the life cycles of these devices are getting even shorter. This presentation discusses the various challenges for testing future high performance computation devices and describes opportunities where ATE helps improving the whole workflow from design to high volume manufacturing.

Panasonic Smart Factory Solutions : Introduction of plasma processing equipment APX300 series

Thursday, December 17 | 11:00 am - 11:30 am

Showa Denko Materials : Solution for Semiconductor & related Businesses

Thursday, December 17 | 11:30 am - 12:00 pm
Company introduction, Solution for Semiconductor & related Businesses

Deloitte Tohmatsu : DX Strategy in Semiconductor Industry after Covid-19

Friday, December 18 | 10:30 am - 11:00 am
Nowadays the semiconductor market is getting more difficult to predict than before due to increasing uncertainty because of US-China trade conflict and the impact of Covid-19. At this seminar, our semiconductor experts will take the stage and describe the direction of DX that Japanese companies should take, referring to how macro-environmental changes affects the semiconductor market and its value chain.

KANOMAX JAPAN INC.

Friday, December 18 | 11:00 am - 11:30 am

Netherlands High Tech Pavilion : Netherlands High Tech Seminar

Friday, December 18 | 11:30 am - 12:00 pm
Introduction to Netherlands High Tech Pavillion, by Dutch high tech companies: BESI, Demcon, SCIL Nanoimprint Solutions and VSParticle (tbc)