SEMI Technology Symposium (STS) 2008

Featured Sessions

Special Program: Next Generation Energy Devices The STS Special Program focuses on key technologies that have the potential to help us produce and use energy more efficiently and combat global warming. Technologies covered include photovoltaics, energy-saving light-emitting diodes (LEDs) and silicon carbide (SiC) power devices. Details and Registration
Inspection & Metrology Complex device structures and shrinking geometries mean that wafer inspection and metrology will play an important role in the 32nm hp node. STS session 3 presents the specifics required of inspection and metrology, and also the state of current leading-edge research in the field. Details & Registration.

Schedule

Dec 03	10:00–16:55	Session 1: Special Program: Next Generation Energy Devices Key Semiconductor Technologies to Tackle Global Warming: Solar Cells, Energy-saving LEDs and SiC Power Devices
	10:00–17:40	Session 2: Microsystems/MEMS New Developments of MEMS Business and MEMS Equipment
	12:35–13:00	The 15th Annual STS Award Ceremony & Commemorative Speeches
	14:00–16:40	Session 3: Inspection & Metrology Key Technology Trend of Inspection & Metrology for the 32nm hp node
Dec 04	10:00–12:50	Session 4: Etching Ultrafine Etching Technology for the 32 nm node —Combination of Profile Variability Control and Metrology—
	13:30–17:05	Session 5: Multi-Level Interconnection The Future of Highly-reliable Next Generation Interconnects with the Innovation of New Materials and Structures
	10:00–17:00	Session 6: DFM / Mask Mask Technologies for 32nm and Beyond — From Optical Extension to NGL—
	10:00–18:30	Session 7: Testing Breakthrough of Testing Technology —From Innovation to Confidence—
Dec 05	10:00–17:05	Session 8: Advanced Devices 32nm/22nm Node Device and Process Technology
	10:00–17:00	Session 9: Lithography Explore the Future of Immersion Lithography and Beyond
	10:00–16:40	Session 10: Packaging Wafer Level vs Packaging Level —Which will Play a Leading Role in Diversified 3D Technologies?—