Seismic Protection and SEMI Safety Guidelines

Seismic protection in SEMI S2/ S17/ S26 and application of SEMI S12 to decontamination of equipment after earthquake

Based on the experiences of both the Great Hanshin-Awaji Earthquake in 1995 and the Taichung Earthquake in 1999 as well as U.S. Uniform Building Code (UBC), SEMI S2/ S26 provide guidance on seismic protection design. However, some of their information seems insufficient compared to SEMI S17, which is recently revised to cover up-to-date seismic protection standards and studies. It is also reported that the industry made good use of SEMI S12 for decontamination after the Tohoku Earthquake.

In this program, usefulness of existing SEMI Safety Guidelines is reviewed, and lessons learned from the past great earthquakes as well as items that should be updated are discussed.

 

*The title of the above listed SEMI Safety Guidelines:

- SEMI S2 "Environmental, Health, and Safety Guideline for Semiconductor Manufacturing  Equipment"
- SEMI S12 "Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination"
- SEMI S17 "Safety Guideline for Unmanned Transport Vehicle (UTV) Systems"
- SEMI S26 "Environmental, Health, and Safety Guideline for FPD Manufacturing System"

 

Chair:

 

Hidetoshi Sakura, Intel
Supika Mashiro, Tokyo Electron

 

Date:

 

Wednesday, December 7

 

Time:

 

13:00-17:30

 

Location:

 

Room 302, International Conference Hall, Makuhari Messe

 

Fee:

 

Register by November 25: JPY9,000 / Register from November 26: JPY12,000

5% Tax not included. Presentation materials are available by downloading.

 

Translation:

 

No Interpretation.

 

Register:

 

register

 

 

Agenda 

 

13:00-

Opening Remarks

13:10-

SEMI Safety Guidelines Useful to Seismic Protection 
-Seismic protection design section in SEMI S2/ S26-

Naokatsu Nishiguchi, Dainippon Screen Manufacturing

13:35-

SEMI Safety Guidelines Useful to Seismic Protection 
Seismic protection design section in SEMI S17- 

Hisashi Aihara/ Kazuyoshi Yamanaka/ Takenaka Corporation 

14:00-

SEMI Safety Guidelines Useful to Seismic Protection
-Decontamination after earthquake and SEMI S12-
 
Shigehito Ibuka, Tokyo Electron

14:25-

Case Study 1
-From user's perspective-
 

F. M. Hsu, TSMC

14:45-

Case Study 2
-From user's perspective- 
Kazuya Morikami, Fujitsu Semiconductor

15:05-

Break

15:20-

Case Study 3
-From equipment supplier's perspective- 
Shingo Watanabe, Tokyo Electron

15:40- 

Case Study 4
-From construction company's perspective- 
Kazuyoshi Yamanaka, Takenaka Corporation

16:00- 

Case Study 4
-From BCP company's perspective- 
Kazuo Komine, Belfor Japan

16:20- 

Panel Discussion and Q&A

What are the items that should be improved in SEMI Safety Guidelines?

17:20-

Wrap up

17:30

Closing Remarks 

 

 

 


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