Conference room 607, Tokyo Big Sight, Tokyo, Japan
14:00-17:00, Wednesday, December 12
The purpose of this workshop is to reconfirm the contents of the SEMI standard that defines specifications for data collection of semiconductor manufacturing equipment (EDA specifications), and to discuss it.
In the workshop, we will discuss below.
- Outlines of the EDA specifications and the technical backgrounds
- Questions and issues on the EDA Specifications
- Answer or consideration of the questions/issues
PART1 Review of EDA Standards
PART2 Discussion on current issues
PART3 Discussion for the Future
Takashi Nakagawa (Yokogawa Solution Service Corporation)
Mitch Sakamoto (ZAMA Consulting)
Alan Weber (Cimetrix Inc.)
Albert Fuchigami (The PEER Group Inc.)
Registration to SEMICON Japan 2018 is required separately if you wish to enter the event. Register SEMICON Japan 2018 here.